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走査型プローブ顕微鏡 - オーラルペディア

走査型プローブ顕微鏡

出典: オーラルペディア

走査型プローブ顕微鏡(SPM) ㈱サンギ提供
走査型プローブ顕微鏡(SPM) ㈱サンギ提供

走査型プローブ顕微鏡(Scanning Probe Microscope)とは、探針という先端の尖った針をナノメートルレベルで試料表面に近接させ、三次元形状を高倍率で観察したり、物性分析を行ったりできる顕微鏡の総称をいいます。 SPMの分解能は、水平距離で数nm~100μm程度、垂直距離では10pm~10数μm程度となっており、非常に微小な領域の観察や分析が可能です。 SPMでの測定においては、探針と試料間で検出される様々な物理量を利用していますが、原子間力を利用する原子間力顕微鏡(AFM)やダイナミックフォースモード(DFM)、トンネル電流を利用する走査型トンネル顕微鏡(STM)、表面電位を利用する表面電位顕微鏡(KFM)等、多くの種類があります。

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